A New Ar Desorption Peak in Thermal Desorption Spectroscopy Measurement of Sputtered HfO<sub>2</sub> Accompanied by its Structural Phase Transformation

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

T. Iwai¹, T. Yajima¹, T. Nishimura¹, K. Nagashio¹, A. Toriumi¹ (1.Univ. of Tokyo (Japan))