[PS-1-3] A New Ar Desorption Peak in Thermal Desorption Spectroscopy Measurement of Sputtered HfO₂ Accompanied by its Structural Phase Transformation

T. Iwai¹、T. Yajima¹、T. Nishimura¹、K. Nagashio¹、A. Toriumi¹ (1.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-3