The Japan Society of Applied Physics

[PS-1-5] Observation of Scattering Effect on Carrier Mobility of MOSFET with La-incorporated-HfO2 Gate Dielectric

S.W. You1, M. Hasan1, M.C. Nguyen1, Y.S. Jeon1, D.T. Tong1, D.H. Lee1, J.K. Jung1, R. Choi1 (1.Inha Univ. (Korea))

https://doi.org/10.7567/SSDM.2013.PS-1-5