[PS-1-5] Observation of Scattering Effect on Carrier Mobility of MOSFET with La-incorporated-HfO₂ Gate Dielectric

S.W. You¹、M. Hasan¹、M.C. Nguyen¹、Y.S. Jeon¹、D.T. Tong¹、D.H. Lee¹、J.K. Jung¹、R. Choi¹ (1.Inha Univ. (Korea))

https://doi.org/10.7567/SSDM.2013.PS-1-5