Observation of Scattering Effect on Carrier Mobility of MOSFET with La-incorporated-HfO<sub>2</sub> Gate Dielectric

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

S.W. You¹, M. Hasan¹, M.C. Nguyen¹, Y.S. Jeon¹, D.T. Tong¹, D.H. Lee¹, J.K. Jung¹, R. Choi¹ (1.Inha Univ. (Korea))