The Japan Society of Applied Physics

[PS-1-9] Effects of the Interface-related and Bulk-fixed Charges in Ge/GeO2 Stack on Band Bending of Ge Studied by X-ray Photoemission Spectroscopy

W.F. Zhang1,2, C.H. Lee1,2, C.M. Lu1, T. Nishimura1,2, K. Nagashio1,2, K. Kita1,2, A. Toriumi1,2 (1.Univ. of Tokyo, 2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-9