[PS-1-9] Effects of the Interface-related and Bulk-fixed Charges in Ge/GeO₂ Stack on Band Bending of Ge Studied by X-ray Photoemission Spectroscopy

W.F. Zhang^1,2、C.H. Lee^1,2、C.M. Lu¹、T. Nishimura^1,2、K. Nagashio^1,2、K. Kita^1,2、A. Toriumi^1,2 (1.Univ. of Tokyo、2.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-1-9