[PS-10-6] Anti-Stiction Technique Using Elastomer Contact Structure in Woven Electronic Textiles

T. Yamashita¹、S. Takamatsu¹、K. Miyake¹、T. Itoh¹ (1.National Inst. of Advanced Indus. Sci. and Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-10-6