[PS-12-15] Oxidized titanium nitride thin films in situ grown by pulsed laser deposition for diluted magnetic semiconductor

S.C. Chen²、K.H. Wu²、J.Y. Juang²、T. Kobayashi²、H.C. Kuo¹ (1.Chiao-Tung Univ.、2.Chiao-Tung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-12-15