[PS-13-18] Fabrication and Radio Frequency Characterization of Graphene Interconnect

K. Heo¹、S.Y. Lee²、K.S. Cho³、S.S. Kim¹、Y.H. Lee²、S.W. Hwang³ (1.Korea Univ.、2.Sungkyunkwan Univ.、3.Samsung Advanced Inst. Tech. (Korea))

https://doi.org/10.7567/SSDM.2013.PS-13-18