[PS-14-12] The XPS Study on Depth Profile of N Atom in Oxynitride Film Formed on 4H-SiC by Radical Nitridation

H. Okada¹、A. Takashima²、T. Muro²、H. Nohira¹ (1.Tokyo City Univ.、2.Japan Synchrotron Radiation Res. Inst. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-14-12