[PS-15-16] Fabrication and Characterization of BaSi₂ Epitaxial Films over 1.5 μm on Si(111)

R. Takabe¹、K. Nakamura¹、M. Baba¹、W. Du¹、M.A. Khan¹、K. Toko¹、M. Sasase²、K. Hara³、N. Usami^3,4、T. Suemasu^1,4 (1.Univ. of Tsukuba、2.The Wakasa Wan Energy Research Center、3.Nagoya Univ.、4.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-15-16