The Japan Society of Applied Physics

[PS-15-17] Direct Formation of Polycrystalline BaSi2 Films on Glass Substrate by RF Sputtering

N.A.A. Latiff1, T. Yoneyama1, T. Shibutami2, K. Matsumaru2, K. Toko1, T. Suemasu1,3 (1.Univ. of Tsukuba, 2.Tosoh Corp., 3.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-15-17