[PS-15-17] Direct Formation of Polycrystalline BaSi₂ Films on Glass Substrate by RF Sputtering

N.A.A. Latiff¹, T. Yoneyama¹, T. Shibutami², K. Matsumaru², K. Toko¹, T. Suemasu^1,3 (1.Univ. of Tsukuba, 2.Tosoh Corp., 3.JST-CREST (Japan))

https://doi.org/10.7567/SSDM.2013.PS-15-17