[PS-2-3] Room Temperature Bonding of Heterogeneous Materials for Near-Infrared Image Sensor

T. Shuto¹、K. Iwanabe¹、M. Ogura²、K. Nishida²、T. Asano¹ (1.Kyushu Univ.、2.IRspec Corp. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-2-3