[PS-2-6] Luminescence from SiO2 by Helium Ion Microscopy without any Damage Characterized by TEM-EELS

S. Ogawa¹、T. Iijima¹、R. Sugie²、N. Kawasaki²、Y. Otsuka² (1.Advanced Industrial Science and Technology (AIST)、2.Toray Research Center, Inc. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-2-6