[PS-6-1] Fully Recessed Schottky Barrier Diodes with a Digital Etching on AlGaN/GaN Heterostructures

N. Jeon¹, W. Choi¹, H. Ryu¹, H.Y. Cha², K.S. Seo¹ (1.Seoul National Univ., 2.Hongik Univ. (Korea))

https://doi.org/10.7567/SSDM.2013.PS-6-1