[PS-6-11] Wet cleaning process for GaN Surface at room temperature

Y. Tsuji^1,2, T. Katsuyama¹, A. Teramoto², Y. Shirai², S. Sugawa², T. Ohmi² (1.Sumitomo Electric Industries, Ltd., 2.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-6-11