[PS-6-24] Effects of Composition on Electrical Properties of Amorphous In-Ga-Zn-O Thin-Film Transistors Deposited Using Atmospheric Pressure Plasma Jet

C.H. Wu¹、K.M. Chang^2,3、H.Y. Hsu²、C.Y. Chen²、S.J. Wang⁴、I.J. Hsieh¹、M.C. Hsu¹、C.S. Chang¹ (1.Chung Hua Univ.、2.Chiao Tung Univ.、3.I-shou Univ.、4.Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-6-24