[PS-6-24] Effects of Composition on Electrical Properties of Amorphous In-Ga-Zn-O Thin-Film Transistors Deposited Using Atmospheric Pressure Plasma Jet

C.H. Wu¹, K.M. Chang^2,3, H.Y. Hsu², C.Y. Chen², S.J. Wang⁴, I.J. Hsieh¹, M.C. Hsu¹, C.S. Chang¹ (1.Chung Hua Univ., 2.Chiao Tung Univ., 3.I-shou Univ., 4.Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-6-24