Implementation of Multi-threshold Voltage a-IGZO TFTs with Oxygen Plasma Treatment

X. He; L.Y. Wang; S.J. Li; M.S. Chan; S.D. Zhang

doi:https://doi.org/10.7567/SSDM.2013.PS-6-26

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[PS-6-26] Implementation of Multi-threshold Voltage a-IGZO TFTs with Oxygen Plasma Treatment

X. He¹, L.Y. Wang¹, S.J. Li¹, M.S. Chan², S.D. Zhang^1,3 (1.Peking Univ., 2.Hong Kong Univ. of Science and Tech., 3.Shenzhen Graduate School, Peking Univ. (China))

https://doi.org/10.7567/SSDM.2013.PS-6-26

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