Implementation of Multi-threshold Voltage a-IGZO TFTs with Oxygen Plasma Treatment

X. He; L.Y. Wang; S.J. Li; M.S. Chan; S.D. Zhang

doi:https://doi.org/10.7567/SSDM.2013.PS-6-26

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜 2013年9月27日
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[PS-6-26] Implementation of Multi-threshold Voltage a-IGZO TFTs with Oxygen Plasma Treatment

X. He¹、L.Y. Wang¹、S.J. Li¹、M.S. Chan²、S.D. Zhang^1,3 (1.Peking Univ.、2.Hong Kong Univ. of Science and Tech.、3.Shenzhen Graduate School, Peking Univ. (China))

https://doi.org/10.7567/SSDM.2013.PS-6-26

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