Sensitivity Enhancement of SOI Photodiode with Randomly Arranged Au Nanoparticles

A. Ono; Y. Enomoto; Y. Matsumura; H. Satoh; H. Inokawa

doi:https://doi.org/10.7567/SSDM.2013.PS-7-24L

2013 International Conference on Solid State Devices and Materials

2013年9月24日〜 2013年9月27日
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[PS-7-24L] Sensitivity Enhancement of SOI Photodiode with Randomly Arranged Au Nanoparticles

A. Ono^1,2、Y. Enomoto³、Y. Matsumura³、H. Satoh^1,2、H. Inokawa¹ (1.Research Institute of Electronics, Shizuoka Univ.、2.Shizuoka Univ.、3.Nippon Steel & Sumikin Chemical Co. Ltd. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-7-24L

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