[PS-7-24L] Sensitivity Enhancement of SOI Photodiode with Randomly Arranged Au Nanoparticles

A. Ono^1,2, Y. Enomoto³, Y. Matsumura³, H. Satoh^1,2, H. Inokawa¹ (1.Research Institute of Electronics, Shizuoka Univ., 2.Shizuoka Univ., 3.Nippon Steel & Sumikin Chemical Co. Ltd. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-7-24L