[PS-7-25L] Long-Period Waveguide Grating on Silicon-on-Insulator (SOI) Substrate Realized by Anisotropic Wet Etching

R.W. Chuang^1,2, M.T. Hsu¹, G.S. Wang¹ (1.National Cheng Kung Univ., 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-7-25L