Performance Improvement of GaN Metal-Semiconductor-Metal Photodetectors with Sputtered AlN Nucleation Layer

C.C. Hung; C.K. Wang; Y.Z. Chiou; C.H. Yen; T.H. Chiang; S.J. Chang

doi:https://doi.org/10.7567/SSDM.2013.PS-7-6

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

[PS-7-6] Performance Improvement of GaN Metal-Semiconductor-Metal Photodetectors with Sputtered AlN Nucleation Layer

C.C. Hung¹, C.K. Wang¹, Y.Z. Chiou¹, C.H. Yen², T.H. Chiang², S.J. Chang² (1.Southern Taiwan Univ. of Sci. and Tech., 2.National Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-7-6

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