[PS-7-6] Performance Improvement of GaN Metal-Semiconductor-Metal Photodetectors with Sputtered AlN Nucleation Layer

C.C. Hung¹、C.K. Wang¹、Y.Z. Chiou¹、C.H. Yen²、T.H. Chiang²、S.J. Chang² (1.Southern Taiwan Univ. of Sci. and Tech.、2.National Cheng Kung Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-7-6