Ballistic Electro-Deposition of Thin Si, Ge, and SiGe Films

2013 International Conference on Solid State Devices and Materials

Sep 24, 2013 - Sep 27, 2013
Hilton Fukuoka Sea Hawk, Fukuoka, Japan

R. Suda¹, M. Ito¹, M. Yagi¹, A. Kojima¹, R. Mentek¹, N. Mori², J. Shirakashi¹, N. Koshida¹ (1.Tokyo Univ. of Agri. & Tech., 2.Osaka Univ. (Japan))