[PS-8-10] Nitridation of Zinc Oxide Film by Pulse Mode Rapid Thermal Annealing

C.W. Lin¹、P.C. Ho¹、S.J. Chang¹、W.W. Chen¹ (1.Univ. of Tatung (Taiwan))

https://doi.org/10.7567/SSDM.2013.PS-8-10