[PS-8-12] Sputtered Pb(Zr,Ti)O₃ piezoelectric films for MEMS application

H. Kobayashi¹, M. Hirose¹, I. Kimura¹, K. Suu¹ (1.ULVAC Inc. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-8-12