Development of phosphor thin films on SiN substrate for electron beam excitation assisted optical microscope

A. Miyake; S. Kanamori; W. Inami; H. Kominami; Y. Kawata; Y. Nakanishi

doi:https://doi.org/10.7567/SSDM.2013.PS-8-16

[PS-8-16] Development of phosphor thin films on SiN substrate for electron beam excitation assisted optical microscope

A. Miyake^1,2、S. Kanamori¹、W. Inami^1,2,3、H. Kominami^1,3、Y. Kawata^1,2,3、Y. Nakanishi³ (1.Graduate School of Sci. and Tech., Shizuoka Univ.、2.CREST, Japan Sci. and Tech. Agency、3.Res. Institute of Electronics, Shizuoka Univ. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-8-16

2013 International Conference on Solid State Devices and Materials

[PS-8-16] Development of phosphor thin films on SiN substrate for electron beam excitation assisted optical microscope