The Japan Society of Applied Physics

[PS-8-2] Photon Energy Dependence of Low-Temperature Crystallization of a-Ge and a-Si0.5Ge0.5 Films by Soft X-ray Irradiation

F. Kusakabe1、Y. Maruyama1、A. Heya1、N. Matsuo1、K. Kanda2、S. Miyamoto2、S. Amano2、T. Mochizuki2 (1.Univ.of Hyogo、2.LASTI,Univ.of Hyogo (Japan))

https://doi.org/10.7567/SSDM.2013.PS-8-2