Photon Energy Dependence of Low-Temperature Crystallization of a-Ge and a-Si<sub>0.5</sub>Ge<sub>0.5</sub> Films by Soft X-ray Irradiation

[PS-8-2] Photon Energy Dependence of Low-Temperature Crystallization of a-Ge and a-Si_0.5Ge_0.5 Films by Soft X-ray Irradiation

F. Kusakabe¹, Y. Maruyama¹, A. Heya¹, N. Matsuo¹, K. Kanda², S. Miyamoto², S. Amano², T. Mochizuki² (1.Univ.of Hyogo, 2.LASTI,Univ.of Hyogo (Japan))