[PS-8-8] Crystallinity Control of Sputtered ZnO:Al Transparent Conducting Films by Utilizing Buffer Layers Fabricated via Nitrogen Mediated Crystallization

N. Itagaki^1,2, K. Oshikawa¹, I. Suhariadi¹, K. Matsushima¹, D. Yamashita¹, H.W. Seo¹, K. Kamataki¹, G. Uchida¹, K. Koga¹, M. Shiratani¹ (1.Kyushu Univ., 2.JST-PRESTO (Japan))

https://doi.org/10.7567/SSDM.2013.PS-8-8