[PS-9-17] Integration of epitaxial PZT thin film infrared detector array with JFET compatible CMOS process

K. Oishi¹、D. Akai²、M. Ishida^1,2 (1.Toyohashi Univ. of Tech.、2.Electronics-Inspired Interdisciplinary Res. Inst. (EIIRIS) (Japan))

https://doi.org/10.7567/SSDM.2013.PS-9-17