[PS-9-18L] Effects of Performance Improvement on InGaZnO Thin Film using by Micro-wave Irradiation for both ReRAM and TFT Applications

Y.H. Hwang¹、H.M. An²、W.J. Cho¹ (1.Kwangwoon Univ.、2.Osan College (Korea))

https://doi.org/10.7567/SSDM.2013.PS-9-18L