Double Sided Fabrication Process of Bi2Sr2CaCu2O8+x THz Oscillator Stack On-chip Coupled to THz Detector by Dilute Acid Solution

T. Nishikata; T. Kato; Y. Kotaki; H. Suematsu; K. Yasui; A. Kawakami

doi:https://doi.org/10.7567/SSDM.2013.PS-9-9

[PS-9-9] Double Sided Fabrication Process of Bi₂Sr₂CaCu₂O_8+x THz Oscillator Stack On-chip Coupled to THz Detector by Dilute Acid Solution

T. Nishikata¹、T. Kato¹、Y. Kotaki¹、H. Suematsu¹、K. Yasui¹、A. Kawakami² (1.Nagaoka Univ. of Tech.、2.Kobe Advanced ICT Res. Center, National Inst. of Info. and Communications Tech. (Japan))

https://doi.org/10.7567/SSDM.2013.PS-9-9

2013 International Conference on Solid State Devices and Materials

[PS-9-9] Double Sided Fabrication Process of Bi2Sr2CaCu2O8+x THz Oscillator Stack On-chip Coupled to THz Detector by Dilute Acid Solution

[PS-9-9] Double Sided Fabrication Process of Bi₂Sr₂CaCu₂O_8+x THz Oscillator Stack On-chip Coupled to THz Detector by Dilute Acid Solution