[B-1-2] Impact of Post-Growth Annealing for Thin-Film Ge Photodiodes on Si

S. Nagatomo¹, Y. Kawamata¹, Y. Izawa², S. Hoshino³, Y. Ishikawa¹ (1.Univ. of Tokyo, 2.Tokyo Electron Miyagi Ltd., 3.Tokyo Electron Ltd. (Japan))

https://doi.org/10.7567/SSDM.2014.B-1-2