The Japan Society of Applied Physics

[B-2-2] High Efficiency Apodized Grating Couplers with Metal Mirrors between a-Si:H Multilayer Waveguides toward 3D Optical Interconnection

Y. Kuno1, J. Kang1, Y. Hayashi1, J. Suzuki1, T. Amemiya1, N. Nishiyama1, S. Arai1 (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2014.B-2-2