[B-2-2] High Efficiency Apodized Grating Couplers with Metal Mirrors between a-Si:H Multilayer Waveguides toward 3D Optical Interconnection

Y. Kuno¹, J. Kang¹, Y. Hayashi¹, J. Suzuki¹, T. Amemiya¹, N. Nishiyama¹, S. Arai¹ (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2014.B-2-2