The Japan Society of Applied Physics

2014 International Conference on Solid State Devices and Materials

2014 International Conference on Solid State Devices and Materials

Sep 8, 2014 - Sep 11, 2014
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[B-2-4] Humidity Tolerance for Athermal Si-Slot Wavelength Filters using Amorphous Fluoride Polymer and SiO2 Protection Layer

Y. Atsumi1, J. Kang1, J. Suzuki1, Y. Hayashi1, N. Nishiyama1, S. Arai1 (1.Tokyo Tech (Japan))

https://doi.org/10.7567/SSDM.2014.B-2-4