The Japan Society of Applied Physics

[B-6-2] MOS Capacitor Type Si Optical Modulator Integrated with Ge Photodetector and its High Speed Operation with CMOS Driver

J. Fujikata1、S. Takahashi1、M. Takahashi2、M. Noguchi1、H. Noguchi3、T. Horikawa2、T. Nakamura1、Y. Arakawa4 (1.PETRA、2.AIST、3.NEC Corp.、4.Univ. of Tokyo (Japan))

https://doi.org/10.7567/SSDM.2014.B-6-2