[B-7-3] Distribution of Refractive Indices of Si-Wire Waveguides Fabricated on a 300 mm SOI Wafer Using ArF Immersion Lithography

M. Soma¹, Y. Tanushi¹, T. Kita¹, M. Toyama^1,2, M. Seki², N. Yokoyama², M. Ohtsuka², H. Yamada¹ (1.Tohoku Univ., 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.B-7-3