[B-7-3] Distribution of Refractive Indices of Si-Wire Waveguides Fabricated on a 300 mm SOI Wafer Using ArF Immersion Lithography

M. Soma¹、Y. Tanushi¹、T. Kita¹、M. Toyama^1,2、M. Seki²、N. Yokoyama²、M. Ohtsuka²、H. Yamada¹ (1.Tohoku Univ.、2.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.B-7-3