The Japan Society of Applied Physics

[B-7-3] Distribution of Refractive Indices of Si-Wire Waveguides Fabricated on a 300 mm SOI Wafer Using ArF Immersion Lithography

M. Soma1, Y. Tanushi1, T. Kita1, M. Toyama1,2, M. Seki2, N. Yokoyama2, M. Ohtsuka2, H. Yamada1 (1.Tohoku Univ., 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2014.B-7-3