[C-6-2] A New Classification of Nano-Scale Crystallinity of In-Ga-Zn-Oxide Films

Y. Nonaka¹、Y. Yamada¹、M. Oota¹、N. Ishihara¹、Y. Kurosawa¹、S. Nishino¹、S. Yamazaki¹ (1.Semiconductor Energy Lab. Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2014.C-6-2