[C-6-2] A New Classification of Nano-Scale Crystallinity of In-Ga-Zn-Oxide Films

Y. Nonaka¹, Y. Yamada¹, M. Oota¹, N. Ishihara¹, Y. Kurosawa¹, S. Nishino¹, S. Yamazaki¹ (1.Semiconductor Energy Lab. Co., Ltd. (Japan))

https://doi.org/10.7567/SSDM.2014.C-6-2