The Japan Society of Applied Physics

[C-6-4] Epitaxial Growth of ZnO Film on Patterned n-GaN Layer by Hydrothermal Method

R.M. Ko1、Y.C. Huang2、T.H. Yu2、S.M. Su3、Y.R. Lin3、S.J. Wang2 (1.Adv. Optoelectronic Tech. Center, National Cheng Kung Univ.、2.Inst. of Microelectronics, National Cheng Kung Univ.、3.Ming Chi Univ. of Tech. (Taiwan))

https://doi.org/10.7567/SSDM.2014.C-6-4