Epitaxial Growth of ZnO Film on Patterned n-GaN Layer by Hydrothermal Method

R.M. Ko; Y.C. Huang; T.H. Yu; S.M. Su; Y.R. Lin; S.J. Wang

doi:https://doi.org/10.7567/SSDM.2014.C-6-4

2014 International Conference on Solid State Devices and Materials

2014年9月8日〜 2014年9月11日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[C-6-4] Epitaxial Growth of ZnO Film on Patterned n-GaN Layer by Hydrothermal Method

R.M. Ko¹、Y.C. Huang²、T.H. Yu²、S.M. Su³、Y.R. Lin³、S.J. Wang² (1.Adv. Optoelectronic Tech. Center, National Cheng Kung Univ.、2.Inst. of Microelectronics, National Cheng Kung Univ.、3.Ming Chi Univ. of Tech. (Taiwan))

https://doi.org/10.7567/SSDM.2014.C-6-4

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