[C-7-4L] Novel Vertical AlGaN Deep Ultra Violet Photo–detector on n+Si Substrate using Spontaneous Via Holes Growth Technique

K. Ozeki¹, N. Kurose¹, N. Iwata², K. Shibano¹, T. Araki¹, I. Kamiya², Y. Aoyagi¹ (1.Ritsumeikan Univ., 2.Toyota Technological Inst. (Japan))

https://doi.org/10.7567/SSDM.2014.C-7-4L