The Japan Society of Applied Physics

[C-7-4L] Novel Vertical AlGaN Deep Ultra Violet Photo–detector on n+Si Substrate using Spontaneous Via Holes Growth Technique

K. Ozeki1, N. Kurose1, N. Iwata2, K. Shibano1, T. Araki1, I. Kamiya2, Y. Aoyagi1 (1.Ritsumeikan Univ., 2.Toyota Technological Inst. (Japan))

https://doi.org/10.7567/SSDM.2014.C-7-4L